Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Physical characterization of the metal/high-k layer interaction upon annealing
Publication:
Physical characterization of the metal/high-k layer interaction upon annealing
Date
2008
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
16547.pdf
185.27 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
Reading, M.
;
van den Berg, J.A.
;
Van Elshocht, Sven
;
Schram, Tom
;
Adelmann, Christoph
;
De Gendt, Stefan
Journal
Abstract
Description
Metrics
Views
1876
since deposited on 2021-10-17
430
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1876
since deposited on 2021-10-17
430
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations