Publication:

Physical characterization of the metal/high-k layer interaction upon annealing

Date

2008

Meeting abstract

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Files

16547.pdf 185.27 KB

Author(s)

Conard, Thierry

;

Franquet, Alexis

;

Vandervorst, Wilfried

;

;

van den Berg, J.A.

;

Van Elshocht, Sven

;

;

Adelmann, Christoph

;

De Gendt, Stefan

Statistics

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Acq. date: 2026-08-05