Publication:
Double hard mask strategy for patterning 0.186 micron2 SRAM cells using FinFET technology
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1922 since deposited on 2021-10-17
Acq. date: 2025-10-28
Citations
Metrics
Views
1922 since deposited on 2021-10-17
Acq. date: 2025-10-28
Citations