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Simple and robust air gap-based MEMS technology for RF-applications

dc.contributor.authorEkkels, Phillip
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-17T06:59:48Z
dc.date.available2021-10-17T06:59:48Z
dc.date.issued2008-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13691
dc.sourceIIOimport
dc.titleSimple and robust air gap-based MEMS technology for RF-applications
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.conference9th International Symposium on RF MEMS and RF Microsystems - MEMSWAVE
dc.source.conferencedate1/07/2008
dc.source.conferencelocationHeraklion Greece
imec.availabilityPublished - imec


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