Simple and robust air gap-based MEMS technology for RF-applications

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Authors
Ekkels, Phillip; Rottenberg, Xavier; Puers, Bob; Tilmans, Harrie
Conference
9th International Symposium on RF MEMS and RF Microsystems - MEMSWAVE
Title
Simple and robust air gap-based MEMS technology for RF-applications
Publication type
Proceedings paper
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