Publication:

Simple and robust air gap-based MEMS technology for RF-applications

Date

2008-07
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorEkkels, Phillip
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-17T06:59:48Z
dc.date.available2021-10-17T06:59:48Z
dc.date.issued2008-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13691
dc.source.conference9th International Symposium on RF MEMS and RF Microsystems - MEMSWAVE
dc.source.conferencedate1/07/2008
dc.source.conferencelocationHeraklion Greece
dc.title

Simple and robust air gap-based MEMS technology for RF-applications

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions