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Conference contributions
Simple and robust air gap-based MEMS technology for RF-applications
Publication:
Simple and robust air gap-based MEMS technology for RF-applications
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Date
2008-07
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ekkels, Phillip
;
Rottenberg, Xavier
;
Puers, Bob
;
Tilmans, Harrie
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Abstract
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1787
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Acq. date: 2025-12-15
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Metrics
Views
1787
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-15
Citations