Publication:

Simple and robust air gap-based MEMS technology for RF-applications

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Ekkels, Phillip
;
Rottenberg, Xavier  
;
Puers, Bob  
;
Tilmans, Harrie  

Journal

Abstract

Description

Statistics

Views

1798 since deposited on 2021-10-17
5last month
Acq. date: 2026-08-25

Citations

Statistics

Views

1798 since deposited on 2021-10-17
5last month
Acq. date: 2026-08-25

Citations