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Optical property changes in low-k films upon ultraviolet-assisted curing
Publication:
Optical property changes in low-k films upon ultraviolet-assisted curing
Date
2008
Journal article
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15151.pdf
603 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eslava Fernandez, Salvador
;
Eymery, Guillaume
;
Marsik, Premysl
;
Iacopi, Francesca
;
Kirschhock, Christine E. A.
;
Maex, Karen
;
Martens, Johan A.
;
Baklanov, Mikhaïl
Journal
Journal of the Electrochemical Society
Abstract
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1898
since deposited on 2021-10-17
400
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Acq. date: 2025-10-25
Citations
Metrics
Views
1898
since deposited on 2021-10-17
400
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations