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Control of laser induced interface traps with in-line corona charge metrology

dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorRosseel, Erik
dc.contributor.authorOrtolland, Claude
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorPavelka, Tibor
dc.contributor.authorDon, Eric
dc.date.accessioned2021-10-17T07:03:25Z
dc.date.available2021-10-17T07:03:25Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13709
dc.sourceIIOimport
dc.titleControl of laser induced interface traps with in-line corona charge metrology
dc.typeProceedings paper
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorRosseel, Erik
dc.source.peerreviewno
dc.source.beginpage163
dc.source.endpage168
dc.source.conference16th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP
dc.source.conferencedate30/09/2008
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - imec


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