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High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions
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Authors
French, Roger H.
;
Bernfeld, Adam S.
;
Tran, Hoang V.
;
Adelman, Douglas J.
;
Liberman, Vladimir
;
Rothschild, Mordechai
;
Hendrickx, Eric
;
Van Roey, Frieda
Conference
5th International Symposium on Immersion Lithography Extensions
Title
High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions
Publication type
Proceedings paper
Embargo date
9999-12-31
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