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Conference contributions
Effect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonator
Publication:
Effect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonator
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gonzalez, Mario
;
Jourdain, Anne
;
Vandevelde, Bart
;
Tilmans, Harrie
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1851
since deposited on 2021-10-17
Acq. date: 2026-07-27
Citations
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Views
1851
since deposited on 2021-10-17
Acq. date: 2026-07-27
Citations