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Effect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonator

dc.contributor.authorGonzalez, Mario
dc.contributor.authorJourdain, Anne
dc.contributor.authorVandevelde, Bart
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-17T07:19:13Z
dc.date.available2021-10-17T07:19:13Z
dc.date.issued2008-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13784
dc.sourceIIOimport
dc.titleEffect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonator
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.conferenceEuroSimE: Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems
dc.source.conferencedate20/04/2008
dc.source.conferencelocationFreiburg Germany
imec.availabilityPublished - imec


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