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Design and characterization of thin SiGe membranes for MEMS packaging at wafer level

dc.contributor.authorGonzalez, Pilar
dc.contributor.authorClaes, Gert
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T07:19:26Z
dc.date.available2021-10-17T07:19:26Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13785
dc.sourceIIOimport
dc.titleDesign and characterization of thin SiGe membranes for MEMS packaging at wafer level
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorDe Meyer, Kristin
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceSemiconductor Advances for Future Electronics Workshop - SAFE
dc.source.conferencedate27/11/2008
dc.source.conferencelocationVeldhoven The Netherlands
imec.availabilityPublished - imec


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