Design and characterization of thin SiGe membranes for MEMS packaging at wafer level

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Authors
Gonzalez, Pilar; Claes, Gert; De Meyer, Kristin; Witvrouw, Ann
Conference
Semiconductor Advances for Future Electronics Workshop - SAFE
Title
Design and characterization of thin SiGe membranes for MEMS packaging at wafer level
Publication type
Proceedings paper
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