Publication:
Design and characterization of thin SiGe membranes for MEMS packaging at wafer level
Date
| dc.contributor.author | Gonzalez, Pilar | |
| dc.contributor.author | Claes, Gert | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Gonzalez, Pilar | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.date.accessioned | 2021-10-17T07:19:26Z | |
| dc.date.available | 2021-10-17T07:19:26Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13785 | |
| dc.source.beginpage | 1 | |
| dc.source.conference | Semiconductor Advances for Future Electronics Workshop - SAFE | |
| dc.source.conferencedate | 27/11/2008 | |
| dc.source.conferencelocation | Veldhoven The Netherlands | |
| dc.source.endpage | 4 | |
| dc.title | Design and characterization of thin SiGe membranes for MEMS packaging at wafer level | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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