Publication:
Design and characterization of thin SiGe membranes for MEMS packaging at wafer level
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1902 since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations
Metrics
Views
1902 since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations