Publication:

Residue formation in MHM-based low-k etch

Date

2008
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Goossens, Danny  
;
de Marneffe, Jean-Francois  
;
Conard, Thierry  
;
Hendrickx, Dirk  
;
Struyf, Herbert  
;
Boullart, Werner  

Journal

Abstract

Description

Statistics

Views

1992 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-08-03

Citations

Statistics

Views

1992 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-08-03

Citations