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Defect creation stimulated by thermally activated hole trapping as the driving force behind negative bias temperature instability in SiO2, SiON, and high-k gate stacks
Publication:
Defect creation stimulated by thermally activated hole trapping as the driving force behind negative bias temperature instability in SiO2, SiON, and high-k gate stacks
Date
2008
Proceedings Paper
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18474.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Grasser, T.
;
Kaczer, Ben
;
Aichinger, T.
;
Goes, W.
;
Nelhiebel, M.
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1947
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1947
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations