Impact of strain on ESD robustness of FinFET devices

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Authors
Griffoni, Alessio; Thijs, Steven; Russ, C.; Trémouilles, David; Scholz, Mirko; Linten, Dimitri; Collaert, Nadine; Rooyackers, Rita; Duvvury, C.; Gossner, H.; Meneghesso, G.; Groeseneken, Guido
Conference
Technical Digest International Electron Devices Meeting - IEDM
Title
Impact of strain on ESD robustness of FinFET devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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