dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Bearda, Twan | |
dc.contributor.author | Kenis, Karine | |
dc.contributor.author | Janssens, Tom | |
dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Wostyn, Kurt | |
dc.contributor.author | Leunissen, Peter | |
dc.contributor.author | Mertens, Paul | |
dc.date.accessioned | 2021-10-17T07:30:55Z | |
dc.date.available | 2021-10-17T07:30:55Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13835 | |
dc.source | IIOimport | |
dc.title | Particle removal efficiency and damage analysis of patterned wafers in different solvents after megasonic cleaning | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.imecauthor | Kenis, Karine | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Wostyn, Kurt | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.contributor.orcidimec | Wostyn, Kurt::0000-0003-3995-0292 | |
dc.source.peerreview | no | |
dc.source.conference | 11th Iternational Symposium on Particles on Surfaces: Detection, Adhesion and Removal | |
dc.source.conferencedate | 16/07/2008 | |
dc.source.conferencelocation | Orono, ME USA | |
imec.availability | Published - imec | |