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In pursuit of "super"high-k ternary oxides: aqueous CSD and material properties
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Authors
Hardy, An
;
Van Elshocht, Sven
;
D'Haen, Jan
;
De Gendt, Stefan
;
Van Bael, Marlies
;
Heyns, Marc
;
D'Olieslaeger, Marc
;
Mullens, Jules
Conference
Materials Science of High-k Dielectric Stacks - From Fundamentals to Technology
Title
In pursuit of "super"high-k ternary oxides: aqueous CSD and material properties
Publication type
Proceedings paper
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