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In pursuit of "super"high-k ternary oxides: aqueous CSD and material properties

dc.contributor.authorHardy, An
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHeyns, Marc
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorMullens, Jules
dc.date.accessioned2021-10-17T07:32:28Z
dc.date.available2021-10-17T07:32:28Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13841
dc.sourceIIOimport
dc.titleIn pursuit of "super"high-k ternary oxides: aqueous CSD and material properties
dc.typeProceedings paper
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.source.peerreviewno
dc.source.beginpageH03-04
dc.source.conferenceMaterials Science of High-k Dielectric Stacks - From Fundamentals to Technology
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1073E


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