dc.contributor.author | Hardy, An | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | D'Haen, Jan | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Van Bael, Marlies | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | D'Olieslaeger, Marc | |
dc.contributor.author | Mullens, Jules | |
dc.date.accessioned | 2021-10-17T07:32:28Z | |
dc.date.available | 2021-10-17T07:32:28Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13841 | |
dc.source | IIOimport | |
dc.title | In pursuit of "super"high-k ternary oxides: aqueous CSD and material properties | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Hardy, An | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | D'Haen, Jan | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Van Bael, Marlies | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.imecauthor | D'Olieslaeger, Marc | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Van Bael, Marlies::0000-0002-5516-7962 | |
dc.source.peerreview | no | |
dc.source.beginpage | H03-04 | |
dc.source.conference | Materials Science of High-k Dielectric Stacks - From Fundamentals to Technology | |
dc.source.conferencedate | 24/03/2008 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |
imec.internalnotes | MRS Symposium Proceedings; Vol. 1073E | |