Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Presentations
View item
imec Publications Repository
imec Publications
Presentations
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Ultrathin film high-k dielectrics from aqueous CSD: relations between deposition route, material properties and electrical properties
Metadata
Show full item record
Authors
Hardy, An
;
Van Elshocht, Sven
;
Van Bael, Marlies
;
D'Haen, Jan
;
De Gendt, Stefan
;
Adelmann, Christoph
;
Conard, Thierry
;
Franquet, Alexis
;
Richard, Olivier
;
D'Olieslaeger, Marc
;
Heyns, Marc
;
Mullens, J.
Conference
Electroceramics XI
Title
Ultrathin film high-k dielectrics from aqueous CSD: relations between deposition route, material properties and electrical properties
Publication type
Oral presentation
Collections
Presentations
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login