Publication:

Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications

Date

2008
Proceedings Paper
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Author(s)

Haspeslagh, Luc  
;
De Coster, Jeroen  
;
Varela Pedreira, Olalla  
;
De Wolf, Ingrid  
;
Du Bois, Bert  
;
Verbist, Agnes
;
Van Hoof, Rita  
;
Willegems, Myriam  
;
Locorotondo, Sabrina  
;
Bryce, George  
;
Vaes, Jan
;
van Drieenhuizen, Bert
;
Witvrouw, Ann

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