Authors

Haspeslagh, Luc; De Coster, Jeroen; Varela Pedreira, Olalla; De Wolf, Ingrid; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Willegems, Myriam; Locorotondo, Sabrina; Bryce, George; Vaes, Jan; van Drieenhuizen, Bert; Witvrouw, Ann

Conference

Technical Digest International Electron Devices Meeting - IEDM

Title

Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications

Publication type

Proceedings paper

Embargo date

9999-12-31