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Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications

dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVerbist, Agnes
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorWillegems, Myriam
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorBryce, George
dc.contributor.authorVaes, Jan
dc.contributor.authorvan Drieenhuizen, Bert
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T07:33:02Z
dc.date.available2021-10-17T07:33:02Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13843
dc.sourceIIOimport
dc.titleHighly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications
dc.typeProceedings paper
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorBryce, George
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage655
dc.source.endpage658
dc.source.conferenceTechnical Digest International Electron Devices Meeting - IEDM
dc.source.conferencedate15/12/2008
dc.source.conferencelocationSan Fransisco, CA USA
imec.availabilityPublished - open access


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