Hyper-NA imaging of 45nm node random CH layouts using inverse lithography

Thumbnail
View/open
Metadata
Show full item record
Authors
Hendrickx, Eric; Tritchkov, Alexander; Sakajiri, Kyohei; Granik, Yuri; Kempsell, Monica; Vandenberghe, Geert
Conference
Optical Microlithography XXI
Title
Hyper-NA imaging of 45nm node random CH layouts using inverse lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections