Publication:

Critical assessment of error budget components in double patterning immersion lithography

Date

2008
Proceedings Paper
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Author(s)

Hepp, Birgitt
;
Finders, Jo
;
Dusa, Mircea  
;
Vleeming, Bert
;
Megens, henry
;
Maenhoudt, Mireille
;
Cheng, Shaunee
;
Vandeweyer, Tom  

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1991 since deposited on 2021-10-17
Acq. date: 2026-04-25

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1991 since deposited on 2021-10-17
Acq. date: 2026-04-25

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