Authors

Herwik, Stanislav; Kisban, Sebastian; Aarts, Arno; Seidl, Karsten; Girardeau, G.; Benchenane, K.; Zugaro, M.B.; Wiener, S.I.; Pereira Neves, Hercules; Paul, Olivier; Ruther, Patrick

Conference

19th MicroMechanics Europe Workshop - MME

Title

Fabrication technology for silicon based microprobe arrays used in acute and subchronic neural recording

Publication type

Proceedings paper