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Fabrication technology for silicon based microprobe arrays used in acute and subchronic neural recording

dc.contributor.authorHerwik, Stanislav
dc.contributor.authorKisban, Sebastian
dc.contributor.authorAarts, Arno
dc.contributor.authorSeidl, Karsten
dc.contributor.authorGirardeau, G.
dc.contributor.authorBenchenane, K.
dc.contributor.authorZugaro, M.B.
dc.contributor.authorWiener, S.I.
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPaul, Olivier
dc.contributor.authorRuther, Patrick
dc.date.accessioned2021-10-17T07:39:55Z
dc.date.available2021-10-17T07:39:55Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13872
dc.sourceIIOimport
dc.titleFabrication technology for silicon based microprobe arrays used in acute and subchronic neural recording
dc.typeProceedings paper
dc.contributor.imecauthorAarts, Arno
dc.source.peerreviewyes
dc.source.beginpage57
dc.source.endpage60
dc.source.conference19th MicroMechanics Europe Workshop - MME
dc.source.conferencedate28/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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