Publication:
Influence of extensions implantation on selective epitaxial growth of Si used for production of FINFET raised source/drains
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1897 since deposited on 2021-10-17
4last month
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Acq. date: 2026-08-10
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Statistics
Views
1897 since deposited on 2021-10-17
4last month
1last week
Acq. date: 2026-08-10
Citations