Authors

Hikavyy, Andriy; Nguyen, Duy; Loo, Roger; Ryan, P.; Wormington, M.; Hopkins, J.

Conference

4th International SiGe Technology and Device meeting

Title

In-line characterisation of hetero bipolar transistor base layers and pMOS devices with embedded SiGe by high-resolution X-ray diffraction

Publication type

Proceedings paper

Embargo date

9999-12-31