Authors

Holsteyns, Frank; Janssens, Tom; Arnauts, Sophia; Van der Putte, W.; Minsier, Vincent; Brunner, J.; Straka, J.; Mertens, Paul

Conference

Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS

Title

Ex situ bubble generation, enhancing the particle removal rate for single wafer megasonic cleaning processes

Publication type

Proceedings paper

Embargo date

9999-12-31