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Plasma-enhanced growth of In seeded Si nanowires and poly-crystalline layers

dc.contributor.authorIacopi, Francesca
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-17T07:50:05Z
dc.date.available2021-10-17T07:50:05Z
dc.date.issued2008-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13913
dc.sourceIIOimport
dc.titlePlasma-enhanced growth of In seeded Si nanowires and poly-crystalline layers
dc.typeProceedings paper
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageQPL-4
dc.source.conferenceIUMRS International Conference in Asia - IUMRS-ICA
dc.source.conferencedate9/12/2008
dc.source.conferencelocationNagoya Japan
imec.availabilityPublished - open access


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