Publication:

Dependence of EUV mask printing performance on blank architecture

Date

2008
Proceedings Paper
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Author(s)

Jonckheere, Rik  
;
Hyun, Yoonsuk
;
Iwamoto, Fumio
;
Baudemprez, Bart  
;
Hermans, Jan  
;
Lorusso, Gian  
;
Pollentier, Ivan  
;
Goethals, Mieke
;
Ronse, Kurt  

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1883 since deposited on 2021-10-17
Acq. date: 2026-07-18

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