Publication:
Impact of incorporated Al on the TiN/HfO2 interface effective work function
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Acq. date: 2026-05-18
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Acq. date: 2026-05-18
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1 since deposited on 2021-10-17
Acq. date: 2026-05-18
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2104 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-18
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