Authors

Kalicinski, Stanislaw; Wevers, Martine; De Wolf, Ingrid

ISSN

0026-2714

Issue

8_9

Journal

Microelectronics Reliability

Volume

48

Title

Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency

Publication type

Journal article