Publication:
Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency
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1889 since deposited on 2021-10-17
Acq. date: 2025-10-26
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Views
1889 since deposited on 2021-10-17
Acq. date: 2025-10-26
Citations