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Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?
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Authors
Ke, Xiaoxing
;
Bals, Sara
;
Romo Negreira, Ainhoa
;
Hantschel, Thomas
;
Bender, Hugo
;
Van Tendeloo, Gustaaf
Conference
14th European Microscopy Congress
Title
Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?
Publication type
Proceedings paper
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