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Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?

dc.contributor.authorKe, Xiaoxing
dc.contributor.authorBals, Sara
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorHantschel, Thomas
dc.contributor.authorBender, Hugo
dc.contributor.authorVan Tendeloo, Gustaaf
dc.date.accessioned2021-10-17T07:57:48Z
dc.date.available2021-10-17T07:57:48Z
dc.date.issued2008-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13943
dc.sourceIIOimport
dc.titleCarbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?
dc.typeProceedings paper
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage673
dc.source.endpage674
dc.source.conference14th European Microscopy Congress
dc.source.conferencedate1/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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