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Atomistic understanding of a single gated dopant atom in a MOSFET
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Authors
Lansbergen, G.
;
Rahman, R.
;
Wellard, C.
;
Caro, J.
;
Collaert, Nadine
;
Biesemans, Serge
;
Klimeck, G.
;
Hollenberg, L.
;
Rogge, S.
Conference
Materials and Devices for "Beyond CMOS" Scaling
Title
Atomistic understanding of a single gated dopant atom in a MOSFET
Publication type
Proceedings paper
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