Publication:

Strategies to improve linewidth control for 0.25 µm and 0.18 µm devices

Date

1996
Journal article
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1374.pdf 1.36 MB

Author(s)

Op de Beeck, Maaike  
;
Ronse, Kurt  
;
Goethals, Mieke
;
Vandenberghe, Geert  
;
Bruggeman, B.
;
Van den hove, Luc  

Journal

Journal of Photopolymer Science and Technology

Abstract

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2 since deposited on 2021-09-29
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1895 since deposited on 2021-09-29
Acq. date: 2026-02-25

Citations