DUV resist materials and processes for 0.25 μm and 0.18 μm CMOS devices

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Authors
Op de Beeck, Maaike; Vandenberghe, Geert; Goethals, Mieke; Van den hove, Luc
Conference
Meeting of the Research Group on Polymers for Microelectronics and Photonics; July 1996
Title
DUV resist materials and processes for 0.25 μm and 0.18 μm CMOS devices
Publication type
Oral presentation
Embargo date
9999-12-31
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