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Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition
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Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Leys, Frederik
;
Liu, Cong
;
Shi, Xiaoping
;
Lamare, B.
;
Takeuchi, Shotaro
;
Schaekers, Marc
;
Loo, Roger
;
Woelk, E.
;
Caymax, Matty
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Views
1891
since deposited on 2021-10-17
1
last month
1
last week
Acq. date: 2026-02-25
Citations