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Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition

dc.contributor.authorLeys, Frederik
dc.contributor.authorLiu, Cong
dc.contributor.authorShi, Xiaoping
dc.contributor.authorLamare, B.
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorSchaekers, Marc
dc.contributor.authorLoo, Roger
dc.contributor.authorWoelk, E.
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-17T08:18:11Z
dc.date.available2021-10-17T08:18:11Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14018
dc.sourceIIOimport
dc.titleEvaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition
dc.typeProceedings paper
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpage159
dc.source.endpage162
dc.source.conferenceSiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
dc.source.conferencedate13/10/2008
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; Vol. 16, Issue 10


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