Publication:

Influence of metal capping layer on the work function of Mo gated metal-oxide semiconductor stacks

Date

2008
Journal article
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Author(s)

Li, Zilan
;
Schram, Tom  
;
Stesmans, Andre  
;
Franquet, Alexis  
;
Witters, Thomas  
;
Pantisano, Luigi
;
Yamada, Naoki
;
Tsunoda, Takaaki
;
Hooker, Jacob
;
De Gendt, Stefan  
;
De Meyer, Kristin  

Journal

Applied Physics Letters

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