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Effect of grown-in defects on the structure of oxygen precipitates in Cz-Si crystals with different diameter
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Authors
Litovchenko, V.G.
;
Lisovskyy, I.P.
;
Claeys, Cor
;
Kladko, V.P.
;
Zlobin, S.O.
;
Muravska, M.V.
;
Efremov, O.O.
;
Slobodjan, M.V.
Conference
Gettering and Defect Engineering in Semiconductor Technology XII
Title
Effect of grown-in defects on the structure of oxygen precipitates in Cz-Si crystals with different diameter
Publication type
Proceedings paper
Embargo date
9999-12-31
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