Effect of grown-in defects on the structure of oxygen precipitates in Cz-Si crystals with different diameter
dc.contributor.author | Litovchenko, V.G. | |
dc.contributor.author | Lisovskyy, I.P. | |
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Kladko, V.P. | |
dc.contributor.author | Zlobin, S.O. | |
dc.contributor.author | Muravska, M.V. | |
dc.contributor.author | Efremov, O.O. | |
dc.contributor.author | Slobodjan, M.V. | |
dc.date.accessioned | 2021-10-17T08:26:22Z | |
dc.date.available | 2021-10-17T08:26:22Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14046 | |
dc.source | IIOimport | |
dc.title | Effect of grown-in defects on the structure of oxygen precipitates in Cz-Si crystals with different diameter | |
dc.type | Proceedings paper | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 405 | |
dc.source.endpage | 412 | |
dc.source.conference | Gettering and Defect Engineering in Semiconductor Technology XII | |
dc.source.conferencedate | 14/10/2007 | |
dc.source.conferencelocation | Erice Italy | |
imec.availability | Published - open access | |
imec.internalnotes | Solid-State Phenomena; Vol. 131-133 |