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Low temperature pre-epi treatment: critical parameters to control interface contamination

dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLeys, Frederik
dc.contributor.authorWada, Masayuki
dc.contributor.authorSano, Ken-Ichi
dc.contributor.authorDe Vos, Brecht
dc.contributor.authorPacco, Antoine
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVanherle, Wendy
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-17T08:31:00Z
dc.date.available2021-10-17T08:31:00Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14061
dc.sourceIIOimport
dc.titleLow temperature pre-epi treatment: critical parameters to control interface contamination
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorDe Vos, Brecht
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVanherle, Wendy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceNanotechnologies Workshop Covering EC-funded R&D on Characterization, Process Technology and Equipment Assessment
dc.source.conferencedate6/10/2008
dc.source.conferencelocationStuttgart Germany
imec.availabilityPublished - imec


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