Authors

Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty

Conference

Nanotechnologies Workshop Covering EC-funded R&D on Characterization, Process Technology and Equipment Assessment

Title

Low temperature pre-epi treatment: critical parameters to control interface contamination

Publication type

Proceedings paper