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Low temperature pre-epi treatment: critical parameters to control interface contamination
Publication:
Low temperature pre-epi treatment: critical parameters to control interface contamination
Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Hikavyy, Andriy
;
Leys, Frederik
;
Wada, Masayuki
;
Sano, Ken-Ichi
;
De Vos, Brecht
;
Pacco, Antoine
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Verheyen, Peter
;
Vanherle, Wendy
;
Caymax, Matty
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2035
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
2035
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations