Publication:

Low temperature pre-epi treatment: critical parameters to control interface contamination

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLeys, Frederik
dc.contributor.authorWada, Masayuki
dc.contributor.authorSano, Ken-Ichi
dc.contributor.authorDe Vos, Brecht
dc.contributor.authorPacco, Antoine
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVanherle, Wendy
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorDe Vos, Brecht
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVanherle, Wendy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-17T08:31:00Z
dc.date.available2021-10-17T08:31:00Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14061
dc.source.conferenceNanotechnologies Workshop Covering EC-funded R&D on Characterization, Process Technology and Equipment Assessment
dc.source.conferencedate6/10/2008
dc.source.conferencelocationStuttgart Germany
dc.title

Low temperature pre-epi treatment: critical parameters to control interface contamination

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions