Authors

Luhn, Ole; Van Hoof, Chris; Ruythooren, Wouter; Celis, Jean-Pierre

ISSN

0167-9317

Issue

10

Journal

Microelectronic Engineering

Volume

85

Title

Barrier and seed layer coverage in 3D structures with different aspect ratios using sputtering and ALD proecesses

Publication type

Journal article

Embargo date

9999-12-31