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Barrier and seed layer coverage in 3D structures with different aspect ratios using sputtering and ALD proecesses
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Acq. date: 2026-08-17
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Acq. date: 2026-08-17
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1 since deposited on 2021-10-17
Acq. date: 2026-08-17
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2030 since deposited on 2021-10-17
6last month
Acq. date: 2026-08-17
Citations